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公開日:2022/07/25 / 最終更新日:2022/07/25

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The present invention relates to a substrate processing apparatus for performing processings including a polishing processing on a surface of a substrate (an object to be processed), such as a semiconductor wafer or a glass substrate for use in liquid crystal displays.
2. Description of the Related Art
In recent years, with higher integration of a semiconductor device, a wiring interval becomes to be finer. Therefore, a polishing technique is widely employed to planarize a surface of a semiconductor wafer to which a film is formed. Such a polishing technique uses a polishing apparatus for rotating a polishing platen around which a polishing pad is attached. This polishing apparatus performs a polishing operation by bringing a wafer held by a carrier into sliding contact with the polishing pad while supplying a polishing agent (slurry) containing fine particles of abrasive, such as alumina, suspended therein onto the polishing pad.
For example, Japanese Laid-Open Patent Publication No. 9-325868 discloses a polishing apparatus for performing a polishing process by bringing a semiconductor wafer held by a carrier into sliding contact with a polishing pad while supplying a polishing agent onto the polishing pad. In this polishing apparatus, a supply roller is brought into contact with the polishing pad. The polishing agent is supplied from this supply roller to a surface of the polishing pad. This polishing apparatus also includes a drain roller provided separately from the supply roller. The polishing agent is transported from the surface of the polishing pad to an end surface

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